Polyimide-Based Capacitive Humidity Sensor

A High Temperature Capacitive Humidity Sensor Based on Mesoporous Silica

Capacitive sensors are the most commonly used devices for the detection of humidity because they are inexpensive and the detection mechanism is very specific for humidity. However, especially for industrial processes, there is a lack of dielectrics that are stable at high temperature (>200 °C) and under harsh conditions. We present a capacitive sensor based on mesoporous silica as the dielectri...

MEMS Capacitive Relative Humidity Sensor Design, Fabrication, and Characterization

The motivating principle behind this research is the development of a small, wearable sensor that would use humidity and temperature measurements as metrics for health monitoring. We have successfully fabricated macro-scale devices via pressing of a polymer between two aluminum plates, and the responses of these capacitors were tested in various humidity conditions. The transition from macro to...

Capacitive Humidity Sensor–Design and Its Application in Measurement Science

A hygrometer is an apparatus that measure humidity. Modern electronic devices use temperature of condensation or change in electrical capacitance to measure humidity difference. Humidity sensors are employed to provide an indication of moisture levels in the environment. To measure moisture level, various technologies are used. A capacitive type moisture sensor consisting of nanoporous thin fil...

Fabrication of Relative Humidity Sensors based on Polyimide Nanoparticles

Fabrication and Evaluation of a Graphene Oxide-Based Capacitive Humidity Sensor

In this study, a CMOS compatible capacitive humidity sensor structure was designed and fabricated on a 200 mm CMOS BEOL Line. A top Al interconnect layer was used as an electrode with a comb/serpent structure, and graphene oxide (GO) was used as sensing material. XRD analysis was done which shows that GO sensing material has a strong and sharp (002) peak at about 10.278°, whereas graphite has (...